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      Phosphine-PH3

      summary

      Name:Phosphine Chemical common name: Formula:PH3 Categories:Participation Miscellaneous Subclasses:Participation Miscellaneous Specifications:5N-6N: Storage methods:DOT steel bottle

      Description

      DescriptionPhosphine is important in semiconductor device manufacturing N-type dopant source, but also for phosphine chemical vapor deposition of polysilicon, epitaxial Ga P materials, ion implantation process, MO CVD process, phosphorus silicate glass (PSG) passivation film was prepared and other processes.
      Usage
      PrecautionsColorless, toxic, flammable gas with a garlic flavor annoying.

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