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Tungsten hexafluoride-WF6

summary

Name:Tungsten hexafluoride Chemical common name： Formula:WF6 Categories:Deposition Subclasses:Deposition Specifications:5N: Storage methods:DOT steel bottle

Description

Description	Tungsten hexafluoride, a colorless gas or light yellow liquid, solid as a deliquescent white crystals, smoke in the humid air. Mainly used for chemical vapor deposition of tungsten, is used as a fluorinating agent. Tungsten hexafluoride is a strong fluorinating agent, with the exception of nickel, Monel and stainless steel, can make a lot of metal fluoride at room temperature. In the dry state of corrosion of the glass is weak, but in the moisture can respond quickly. Tungsten hexafluoride and ionic halide complex compound may be formed at a high temperature can be reduced to hydrogen tungsten. Tungsten hexafluoride water quickly hydrolyzed rapidly generate hydrogen fluoride (HF) and tungsten trioxide.
Usage	Mainly used for chemical vapor deposition of tungsten, is used as a fluorinating agent.
Precautions	In case of moist air or water decomposition, distribution also highly toxic and corrosive hydrogen fluoride fumes. The goods to the eyes, skin and mucous membranes can cause serious burns.
By Industry	Chemical industry

1, 3 butadiene, pure hydrogen and high purity oxygen, nitrogen, argon, hydrogen, nitrogen dioxide, trimethyl bromide boron TMB, silane and silane mix other gas, hydrogen, nitrogen trifluoride selenide, boron trifluoride, liquid ammonia, etching gas, electronic gas, six fluoride oxide, hydrogen sulfide, and methane, high pure butane, high purity isobutane methane, high purity, high purity, high purity propane butane, high-purity propylene and isobutylene, butadiene, ethane, butene, anti - 2 - butene, propylene, propiolic, vinyl acetylene, ethyl acetylene, carbonyl sulfur, allene, sulfur hexafluoride, new pentane, carbon tetrafluoride, eight fluorine cyclobutane, nitric oxide, high purity nitrous oxide (n2o), hydrogen chloride, high purity helium, ultrapure, ultra pure nitrogen, pure argon and helium gas standard.Trimethyl gallium, trimethyl indium gallium, trimethyl aluminum, triethyl, triethyl indium, diethyl zinc, zinc dimethyl, dicyclopentadienyl magnesium source (MO)

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