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      Hexafluoroethan-C2F6

      summary

      Name:Hexafluoroethane Chemical common name:全氟乙烷 Formula:C2F6 Categories:Etching Class Subclasses:Etching Class Specifications:5N: Storage methods:Steel cylinders

      Description

      DescriptionHexafluoroethane (hexafluoroethane), also known as perfluoroethane, ethane is the product of all the six hydrogen atoms substituted by fluorine atoms after, halogenated hydrocarbons (chemical formula: C2F6), is also the hydrocarbons ethane corresponding perfluorinated compounds, is a non-flammable gas, insoluble in water, slightly soluble in alcohol. Hexafluoroethane be used together along with HFC refrigerant R508A (Hexafluoroethane 61%) and R508B (Hexafluoroethane 54%).
      UsageUsed as the insulating gas, plasma etchants, high dielectric strength coolant Ling.
      PrecautionsThis product can cause rapid suffocation. After exposure cause headache, nausea, and dizziness. Dangerous for the environment, for water and atmospheric pollution, atmospheric ozone has a strong destructive power. This product is non-combustible.
      By IndustrySemiconductor

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