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ALD/CVD前驅(qū)前驅(qū)體-金谷氣體前驅(qū)體材料

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金谷氣體前驅(qū)體材料

詳細介紹

序號	中文名	英文名稱	化學(xué)式	CAS號	別名	純度（%）
1	三甲基鋁	Trimethyl Aluminum	C3H9Al	75-24-1	TMA	99.9999
2	三乙基鋁	Triethyl Aluminum	(C2H5)Al	97-93-8	TEA	99.9999
3	二乙基鋅	Diethylzinc	Zn(C2H5)2	557-20-0	DEZ	99.9999
4	二甲基鋅	Dimethylzinc	C2H6Zn	544-97-8	DMZ	99.9999
5	三甲基鎵	Trimethylgallium	Ga(CH3)3	1445-79-0	TMG	99.9999
6	三乙基鎵	Triethylgallium	Ga(C2H5)3	1115-99-7	TEG	99.9999
7	三甲基銦	Trimethylindium	C3H9In	3385-78-2	TMI	99.9999
8	三甲基鉍	Trimethylbismuth	(CH3)3Bi	593-91-9	TMBi	99.9999
9	三甲基銻	Trimethyl antimony	Sb(CH3)3	594-10-5	TMSb	99.9999
10	三乙基銻	Antimony triethy	C6H15Sb	617-85-6	TESb	99.9999
11	二乙基鈹	Diethylberyleium	Be(C2H5)2		DEB	99.9999
12	二叔丁基碲	Di-t-butyltelluride	PhTeMgBr	83817-35-0	DTBT	99.9999
13	二乙基碲	Diethvl tellurium	Te(C2H5)2	627-54-3	DETe	99.9999
14	二異丙基碲	Diisopropyltellurium	C6H14Te	51112-72-2	DipTe	99.99
15	三（二甲氨基）鎵	Tris(dimethylamido)gallium(III)	Ga(N(CH3)2)3	57731-40-5	TDMAG	99.99
16	三（二甲胺）銻	Tris(dimethylamido)antimony(III)	C6H18N3Sb	7289-92-1	TDMASb	99.9999
17	四（二甲胺）鉿	Tetrakis(diethylamion)hafnium	C8H24HfN4	19962-11-9	TDMAH	99.9999
18	四（甲乙胺）鉿	Ethanamine, N-methyl-,hafnium(4+) salt (4:1)	C12H32HfN4	352535-01-4	TEMAH	99.9999
19	四（二甲胺）鍺	N-methyl-N-[tris(dimethylamino)germyl]methanamine	C8H24GaN4	7344-40-3	TDMAGe	99.9999
20	四（二甲胺）鋯	Tetrakis(dimethylamino)zirconium	C8H24N4Zr	19756-04-8	TDMAZ	99.9999
21	四（甲乙胺）鋯	Tetrakis(ethylmethylamino)zirconium	C12H32N4Zr	175923-04-3	TEMAZ	99.9999
22	四（二甲胺）錫	N-methyl-N-[tris(dimethylamino)stannyl]methanamine	C8H24N4Sn	1066-77-9	TDMASn	99.9999
23	四氯化錫	Tin(IV) chloride	Cl4Sn	7646-78-8	SnCl4	99.9999
24	四（二甲胺）鈦	Tetrakis(dimethylamino)titanium	C8H24N4Ti	3275-24-9	TDMAT	99.9999
25	四（甲乙胺）鈦	Ethyl(methyl)azanide,titanium(4+)	C12H32N4Ti	308103-54-0	TEMAT	99.9999
26	四（甲乙胺）釩	Tetrakis(ethylmethylamino)vanadium	C12H32N4V	791114-66-4	TEMAV	99.99
27	五（乙氧基）鉭 -乙氧基鉭	Tantalum(5+) ethanolate	C10H30O5Ta	6074-84-6	PETOTa	99.999
28	五（二甲胺）鉭	Pentakis(dimethylamino)tantalum(V)	C10H30N5Ta	19824-59-0	PDMATa	99.999
29	三(乙基甲酰胺基)(叔丁基酰亞氨)鉭(V)	Tris(ethylmethylamido)(tert-butylimido)tantalum(V)	C13H33N4Ta	511292-99-2	TBTEMTa	99.999
30	二茂鐵	Ferrocene	C10H10Fe	102-54-5	FeCp2	99.999
31	二茂鎂	Magnesocene	C10H10Mg	1284-72-6	MgCp2	99.9999
32	二茂錳	Manganocene	C10H10Mn	73138-26-8	MnCp2	99.999
33	二茂鎳	Nickelocene	C10H10Ni	1271-28-9	NiCp2	99.999
34	二茂釕	Ruthenocene	C10H10Ru	1287-13-4	RuCp2	99.99
35	二茂鈷	Cobaltocene	(η5-C5H5)2Co	1277-43-6	CoCp2	99.999
36	二甲基二茂鎂	bis(methylcyclopentadienyl)magnesium	C12H14Mg	40672-08-0	Mg(MeCp)2	99.9995
37	二乙基二茂鎂	Bis(ethylcyclopentadienyl)magnesium	C14H18Mg	114460-02-5	Mg(EtCp)2
38	二乙基二茂錳	1,1'-Diethylmanganocene	C14H18Mn	101923-26-6	Mn(EtCp)2	99.999
39	二乙基二茂釕	Bis(ethylcyclopentadienyl)ruthenium	C7H9RuC7H9	32992-96-4	Ru(EtCp)2	99.999
40	（四甲基庚二酮）鋰	Lithium Dipivaloylmethanate	C11H19LiO2	22441-13-0
41	（四甲基庚二酮）銀	(2,2,6,6-Tetramethyl-3,5-heptanedionato)silver	C11H19AgO2	79827-25-1
42	二（六氟戊二酮）銅	Copper(II) hexafluoroacetylacetonate hydrate	Cu(C5HF6O2)2	155640-85-0	Cu(hfac)2	99.999
43	二（六氟乙酰丙酮）鈀	Palladium(II)hexafluoro-2,4-pentanedionate	C10H8F18O4Pd	64916-48-9	Pd(hfac)2	99.99
44	三（乙酰丙酮）銥	Iridium(III)2,4-pentanedionate	C15H21IrO6	15635-87-7	Ir(acac)3	99.99
45	三（四甲基庚二酮）釹	Neodymium-thd	C33H60NdO6	15492-47-4	Nd(thd)3	99.999
46	三（四甲基庚二酮）鐿	Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ytterbium(III)	C33H57O6Yb	15492-52-1	Yb(thd)3	99.999
47	四（四甲基庚二酮）鈰	Tetrakis(tetramethylheptanedionato)cerium	C22H38CeO4	18960-54-8	Ce(thd)4	99.999
48	三（四甲基庚二酮）鑭	Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)lanthanum(III)	C33H57LaO6	14319-13-2	La（thd）3	99.999
49	甲基環(huán)戊二烯鑭	Tris(tetramethylcyclopentadienyl)lanthanum	C27H39La	148607-23-2	La(MeCp)3	99.995
50	三(二(三甲硅)胺)鑭	Bis(trimethylsilyl)azanide,lanthanum(3+)	C18H54LaN3Si6	175923-07-6	La(TMSA)3	99.99
51	二（四甲基庚二酮）鉛	Lead(II)-2,2,6,6-tetramethyl-3,5-heptanedionate	C22H38O4Pb	21319-43-7	Pb(thd)2	99.999
52	二（四甲基庚二酮）銫	Cesium (II)-2,2,6,6-tetramethyl-3,5-heptanedionate	C11H19O2Cs	61346-75-6	Csthd	99.999
53	三（四甲基庚二酮）鉍	Bismuth III Tetramethylheptanedionate	C33H57BiO6	142617-53-6	Bi(thd)3
54	三（四甲基庚二酮）鉺	Erbium-DPM	C33H57ErO6	34750-80-6	Er(thd)3	99.999
55	三（四甲基庚二酮）釔	Tris(2,2,6,6-Tetramethyl-3,5-Heptanedionato)Yttrium(III)	C33H57O6Y	15632-39-0	Y(thd)3	99.999
56	三(二(三甲硅)胺)釓	Bis(trimethylsilyl)azanide,gadolinium(3+)	C18H54GdN3Si6	35789-03-8	Gd(TMSA)3	99.999
57	二（N,N’-二異丙基乙脒基）鈷	Bis(N,N'-di-i-propylacetamidinato)cobalt(II)	(C8H17N2)2Co	635680-58-9	Co(iPr-MeAMD)2	99.99
58	二（N,N’-二異丙基乙脒基）鎳	Bis(N,N'-diisopropylacetamidinato) Nickel (II)	C16H34N4Ni	635680-62-5	Ni(iPr-MeAMD)2	99.99
59	三（N,N’-二異丙基乙脒基）鑭	Tris(N,N’-Di-tert-butylacetamidinato)lanthanum(III)	(C8H17N2)3La		La(iPr-MeAMD)3	99.99
60	三（N,N’-二異丙基乙脒基）釔	Tris(N,N’-Di-tert-butylacetamidinato)Yttrium(III)	(C8H17N2)3Y		Y(iPr-MeAMD)3	99.99
61	六羰基鉬	Molybdenum hexacarbonyl	Mo(CO)6	13939-06-5	Mo(CO)6	99.99
62	二(乙酰丙酮)鉑(II)	Platinum bis(acetylacetonate)	C10H14O4Pt	15170-57-7		99.999
63	三甲基甲基環(huán)戊二烯鉑	(Trimethyl)methylcyclopentadienylplatinum (IV)	C9H16Pt	94442-22-5	Me3Pt(MeCp)	99.99
64	甲基環(huán)戊二烯釔	Tris(methylcyclopentadienyl)yttrium(III)	C18H21Y	329735-72-0	Y(MeCp)3	99.995
65	環(huán)戊二烯基銦	Indium,(h5-2,4-cyclopentadien-1-yl)-	C5H5In	34822-89-4	InCp	99.9999
66	四異丙醇鈦	Titanium(IV) isopropoxide	C12H28O4Ti	546-68-9	TIPT	99.9999
67	五（二甲胺基）鈮	Pentakis(dimethylamino)Niohium(V)	PDMANb			99.999
68	五（甲氧基）鈮	Niohium pentamethnxidc	Nb(OCH3)5			99.999
69	五（乙氧基）鈮	Niohium pentaethnxidc	Nb(OC2H5)5	3236-82-6	PETONb	99.999
70	叔丁醇鋰	Lithium t-butoxide	C4H9LiO	1907-33-1	TBOLi	99.99
71	叔丁醇鐵	Iron t-butoxide	C12H27FeO3	620945-29-1	3TBOFe	99.99
72	三異丙氧基鎵	GALLIUM (III) ISOPROPOXIDE	C9H21GaO3	4452-61-3	TPGa	99.999
73	四氯化鈦	Titanium tetrachloride	TiCl4	7550-45-0	TiCl4	99.9999
74	四氯化碳	Carbon tetrachloride	CCl4	56-23-5	CCl4	99.9999
75	四溴化碳	Carbon tetrabromide	CBr4	558-13-4	CBr4	99.9999
76	五氯吡啶	Pentachloropyridine	C5Cl5N	2176-62-7	PCP	99.99
77	硼化合物	boride	B		AMY-B-330	99.999
78	甲氧基鍺	Germanium(Ⅳ) methoxide	C4H12GeO4	992-91-6		99.99
79	六羰基鎢	hexacarbonyl tungsten	W（CO)6	14040-11-0	W(CO)6	99.9995%
80	叔丁基膦	Tert-Butyiphosphine	C4H11P	2501-94-2	TBP	99.9990%
81	叔丁基砷	Tert-Butylarsine	C4H11As	7310-29-90	TBAs	99.9990%
82	硼酸三甲酯	Trimethyl borate	C3H9BO3	121-43-7	TMB(O)	99.9999%
83	硼酸三乙酯	Triethyl borate	C6H15BO3	150-46-9	TEB(O)	99.9999%
84	磷酸三甲酯	Trimethyl phosphate	C3H9O4P	512-56-1	TMPO	99.9999%
85	亞磷酸三甲酯	trimethyl phosphite	C3H9O3P	121-45-9	TMPi	99.9999%
86	磷酸三乙酯	Triethyl phosphate	C6H15O4P	78-40-0	TEPO	99.9999%
87	亞磷酸三乙酯	Triethyl phosphite	C6H15O3P	122-52-1	TEPi	99.9999%
88	硼酸三異丙酯	Triisopropyl borate	C9H21O3B	5419-55-6		99.9999%
89	雙（四甲基庚二酮）釓			14768-15-1	Gd(thd)3	99.9990%
90	三（雙（三甲基甲硅烷）胺釓			35789-03-8	Gd(SiMe3)2}3	99.9990%
91	三（甲基環(huán)戊二烯）釓				Gd(MeCp)3	99.9990%
92	三乙基膦(6,6,7,7,8,8,8-七氟-2,2-二甲基-3,5-辛烷二酮)銀(I)			165461-74-5	Ag(fod)(PEt3)	99.99%


1	雙(叔丁基氨基)硅烷	Bis(t-butylamino)silane	([NH(C4H9)]2SiH2)	186598-40-3	BTBAS	99.9999
2	三（二甲氨基）硅烷	Tris(dimethylamino)silane	C6H19N3Si	15112-89-7	3DMAS	99.9999
3	(N,N-二硅烷基-硅烷胺)	N,N-Disilylsilanamine	H9NSi3	13862-16-3	TSA	99.999
4	雙（二乙胺基）硅烷	Bis(diethylamino)silane	C8H22N2Si	27804-64-4	BDEAS(SAM24)	99.9999
5	二（異丙氨基）硅烷	Diisopropylaminosilane	C6H17NSi	908831-34-5	DIPAS(LTO-520)	99.9999
6	原硅酸乙酯	Tetraethyl Orthosilicate	C8H22N2Si	78-10-4	TEOS	99.9999999
7	六氯乙硅烷	Hexachlorodisilane	Si2Cl6	13465-77-5	HCDS	99.9999
8	四（二甲氨基）硅



1	1,1,3,3-四甲基二硅氮烷	Bisdimethylsilylamine	C4H15NSi2	15933-59-2		99.9999
2	乙二胺	Ethylenediamine	C2H8N2	107-15-3		99.999
3	一叔丁胺	tert-Butylamine	(CH3)3CNH2	75-64-9		99.999
4	偏二甲肼	unsym-Dimethylhydrazine	C2H8N2	57-14-7		99.999


1	二（三氯甲硅基）碳烷	Methylenebis(trichlorosilane)	CH2Cl6Si2	4142-85-2		99.999
2	四氯化碳	carbon tetrachloride	CCl?	56-23-5		99.9999
3	四溴化碳	Carbon tetrabromide	CBr4	558-13-4		99.9999
4	1，2-二氯乙烯（反式）	Trans-1,2-Dichloroethylene	C2H2Cl2	156-60-5		99.9999
5	1-己烯	1-Hexene	C6H12	592-41-6		99.9999

1, 3 butadiene, pure hydrogen and high purity oxygen, nitrogen, argon, hydrogen, nitrogen dioxide, trimethyl bromide boron TMB, silane and silane mix other gas, hydrogen, nitrogen trifluoride selenide, boron trifluoride, liquid ammonia, etching gas, electronic gas, six fluoride oxide, hydrogen sulfide, and methane, high pure butane, high purity isobutane methane, high purity, high purity, high purity propane butane, high-purity propylene and isobutylene, butadiene, ethane, butene, anti - 2 - butene, propylene, propiolic, vinyl acetylene, ethyl acetylene, carbonyl sulfur, allene, sulfur hexafluoride, new pentane, carbon tetrafluoride, eight fluorine cyclobutane, nitric oxide, high purity nitrous oxide (n2o), hydrogen chloride, high purity helium, ultrapure, ultra pure nitrogen, pure argon and helium gas standard.Trimethyl gallium, trimethyl indium gallium, trimethyl aluminum, triethyl, triethyl indium, diethyl zinc, zinc dimethyl, dicyclopentadienyl magnesium source (MO)

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